The performance of Atomic Force Microscope (AFM) is greatly determined by the quality of its probe. Nowadays, probes of diamond tips have become more and more popular than silicon ones, and have been widely used in industries. In this paper, research about the fabricating of nanocrystalline diamond (NCD) coated AFM probe has been done using Hot-Filament Chemical Vapour Deposition (HFCVD) technique. The results showed that NCD films have been grown on the probe. Problems about the growth of NCD on the tips have been discussed. The optimum parameters have also been proposed. This research can provide reference for the further experiments on the fabrication of NCD coated tips.
nanocrystalline diamond filmNCDAFMprobe
Mingmin Huang、Dunwen Zuo、Wenzhuang Lu、Feng Xu、Min Wang
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College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics & Astronautics, Nanjing, China, 210016
NETL
NSTL
Trans Tech Publications Ltd
