Influence of Deposition Parameters on the Characteristics of AZOY Transparent Conducting Oxide Thin Film

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NETL
NSTL
Trans Tech Publications Ltd

外文摘要："GfE Coating Materials Company" had developed a novel AZOY transparent conducting oxide (TCO) material that used ZnO as raw material and contained a small amount of Y_2O_3 and Al_2O_3. In this study, the AZOY material developed by GfE company is used as the based TCO material and we will develop the influences of substrate temperatures on the characteristics of AZOY TCO films by RF sputtering method, under optimal O_2/argon ratio and depositing pressure. After deposition, the sheet resistance of AZOY films is measured with a four point probe, and surface morphology and cross-sections are studied using a field emission scanning electron microscope (FESEM). And finally, the UV-Vis spectrophotometer is used to find the transmittance of AZOY TCO films.

外文关键词：

transparent conducting oxidezinc oxideUV-Vis spectrophotometer

作者：

Chien-Chen Diao、Chao-Chin Chan、Chia-Ching Wu、Cheng-Fu Yang

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作者单位：

Department of Electronic Engineering, Kao Yuan University, Kaohsiung, Taiwan

Department of Chemical and Biochemical Engineering, Kao Yuan University, Kaohsiung, Taiwan

Department of Chemical and Materials Engineering, National University of Kaohsiung, Kaohsiung, Taiwan

出版年：

2010

DOI：

10.4028/www.scientific.net/KEM.434-435.653

Key engineering materials

ISSN：1013-9826

年,卷(期)：2010.434/435

参考文献量10