W-doped DLC films were synthesized from CH_4 and W by ion beam deposition and magnetron sputtering, and the influence of W target current on the surface morphology and the mechanical properties of W-doped DLC films deposited were studied. The W-doped DLC films in the study have a smooth dense surface with several particles of about 2micron. The hardness, the modulus, and the film-substrate adhesion of the films are increased with the rise of W target current and the critical load of the scratch test for all the W-doped DLC films is above 70N. The friction coefficient of W-doped DLC films is increased with the increase of W target current while the lowest wear rate is obtained when W target current is 1A.
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