首页|Properties of Nanosize Aluminum Nitride Powders Synthesized by Chemical Vapor Synthesis

Properties of Nanosize Aluminum Nitride Powders Synthesized by Chemical Vapor Synthesis

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  • NETL
  • NSTL
  • Trans Tech Publications Ltd
AlN powders by the chemical vapor synthesis (CVS) process in the AlCl_3-NH_3-N_2-H_2 system were successfully synthesized. Gasified AlCl_3 as a starting material was generated by pre-heating system and transported to the tube furnace in NH_3-N_2-H_2 atmosphere. High crystalline AlN was synthesized at over 900℃. The average particle size of spherical AlN powders decreased from 250 to 40nm with increasing the reaction temperature of the tube furnace. Porous nano-size particles synthesized at high reaction temperature have low oxygen contents.

AlNnitridationchemical vapor synthesisAlCl_3-NH_3-N_2-H_2 system

Jae-Hwan Pee、Jong-Chul Park、Kwang-Taek Hwang、SooRyong Kim、Woo-Seok Cho

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595-7 Sukwang-li, Sindun-myeon, Icheon-si, Gyeonggi-do, 467-843, KICET, Korea

2010

10.4028/www.scientific.net/KEM.434-435.830

Key engineering materials

Key engineering materials

ISSN：1013-9826
年,卷(期)：2010.434/435
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