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Measurement and Visualization of Dynamics of Piezoelectric Microcantilever

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  • NETL
  • NSTL
  • Trans Tech Publications Ltd
Methods for measuring the resonant frequencies and visualizing the motion of the Pb(Zr_(0.5)Ti_(0.5))O_3 microcantilever are investigated. Considering the two-segment structure of the microcantilever, a self-exiting self-sensing method is proposed to obtain the fundamental resonant frequency. An optical system consisting of light microscope, CCD camera and video card is established to visualize the first two vibration mode shapes. The theoretical, measured and visualized first resonance of one micocantilever is 17.28 kHz, 17 kHz and 17.8 kHz, respectively. A theoretical second resonance of 84.16 kHz is seen at 71.9 kHz. The proposed method is valid for measuring and visualizing low resonances of active micro structure.

piezoelectricmicrocantileverdynamicsnatural frequencyvisualization

Weijie Dong、Mengwei Liu、Cui Yan

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Dept. of Electronic Engineering, Dalian University of Technology, Dalian 116023, China

Institute of Acoustics, Chinese Academy of Science, Beijing 100190, China

School of Mechanical Engineering, Dalian University of Technology, Dalian 116023, China

2010

10.4028/www.scientific.net/KEM.437.30

Key engineering materials

Key engineering materials

ISSN：1013-9826
年,卷(期)：2010.437
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