首页|Microrelief Measurements for White-Light Interferometer with Adaptive Algorithm Interferogram Processing

Microrelief Measurements for White-Light Interferometer with Adaptive Algorithm Interferogram Processing

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  • NETL
  • NSTL
  • Trans Tech Publications Ltd
The problem of reducing measurement errors of surface microrelief with nonuniform scattering properties using white-light interferometer was discussed. Adaptive algorithm of thresholding which allows us to set optimal threshold in every point of measuring surface was proposed. Application of this algorithm of threshold choice allows increasing dynamical range of interference detection more than in 10 times. The dependences of scanning interferometer resolution on differentional interferogram thresholding have been discussed.

relief measurementinterferencesurface quality inspectionthresholding

Evgeny V. Sysoev、Rodion V. Kulikov

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Technological Design Institute of Scientific Instrument Engineering (TDI SIE) Siberian Branch of the Russian Academy of Sciences (SB RAS) 41, Russkaya str., Novosibirsk, 630058, Russia

2010

10.4028/www.scientific.net/KEM.437.35

Key engineering materials

Key engineering materials

ISSN：1013-9826
年,卷(期)：2010.437
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