首页|Model-based Correction of Image Distortion in Scanning Electron Microscopy
Model-based Correction of Image Distortion in Scanning Electron Microscopy
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NETL
NSTL
Trans Tech Publications Ltd
A new Monte-Carlo program for simulation image formation in scanning electron microscopy for real three-dimensional use is presented; factors of image distortions are realized in the program, in respect of future photogrammetric evaluation. A first attempt for generating a 3D-analysis of simulated images is shown.
Monte Carlo SimulationSEMmicro- and nano-metrology
Dominic Gnieser、Carl Georg Frase、Harald Bosse、Rainer Tutsch
NETL
NSTL
Trans Tech Publications Ltd
