首页|Nanorelief Measurements Errors for a White-Light Interferometer with Chromatic Aberrations
Nanorelief Measurements Errors for a White-Light Interferometer with Chromatic Aberrations
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NETL
NSTL
Trans Tech Publications Ltd
Chromatic aberrations in white-light interferometer can dramatically increase measurement nanorelief errors. It is shown that these errors can be more than 70 nm. They are result of changing effective wavelength within the measurement field. We have proposed the method for error calculation using measurement data and then their correction experimentally up to 10 nm.
Technological Design Institute of Scientific Instrument Engineering (TDI SIE) Siberian Branch of the Russian Academy of Sciences (SB RAS) 41, Russkaya str., Novosibirsk, 630058, Russia
NETL
NSTL
Trans Tech Publications Ltd
