The trend in many fields of enabling technologies, such as microelectronics, communications, microsystems, and micromechanics, toward imposing increasingly stringent demands upon precision continues. Those types of technologies allow creating micromechanical components having dimensions of a few micrometers that have to be accurately measured, positioned relative to one another, and assembled. In that conjunction, laser-interferometric metrology provides unique opportunities that combine measurements over large ranges at extraordinarily fine resolutions with traceability of measurement results to international length standards. Laser-interferometric metrological systems may be used for measuring displacements ranging from subnanometers to several meters, without need for reconfiguring the optical or electronic systems involved or their component devices.
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Trans Tech Publications Ltd
