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Micro Coordinate Measuring Machine for Parallel Measurement of Microstructures
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Trans Tech Publications Ltd
This paper deals with the development of a coordinate measuring machine for parallel tactile probing of microstructures. The particular challenges due to the parallel probing will be discussed and the concluding results regarding the construction, the control and the simulation environment will be outlined.
coordinate measuring systemmicro touch probe
Christian Schrader、Christian Herbst、Rainer Tutsch、Stephanus Buttgenbach、Thomas Krah
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TU Braunschweig, Institute of Production Measurement Technology, Schleinitzstrasse 20, 38106 Braunschweig, Germany
TU Braunschweig, Institute for Microtechnology Alte Salzdahlumer Strasse 203, 38124 Braunschweig, Germany
NETL
NSTL
Trans Tech Publications Ltd
