首页|Development of Innovative Fringe Locking Strategies for Vibration-Resistant White Light Vertical Scanning Interferometry (VSI)

Development of Innovative Fringe Locking Strategies for Vibration-Resistant White Light Vertical Scanning Interferometry (VSI)

扫码查看
原文链接
  • NETL
  • NSTL
  • Trans Tech Publications Ltd
White light interferometry has become an important method for measuring micro surface profiles with a long vertical range and nano-scale resolution. However, environmental vibration encountered in in-field optical inspection is usually unavoidable and it affects measurement performance significantly. Isolating vibration sources from the measurement system sometimes is not completely effective, especially within complicated in-field fabrication environment. Therefore, in this research we aim to develop a novel method in achieving white-light fringe-locking condition during vertical scanning processes. The developed optical system consists of white light source, a Mirau objective, a PZT vertical scanner, an optical band-pass filter and two image sensing devices. The developed system generates a high and a low coherent interferograms, simultaneously captured by two charged coupled devices (CCDs). The high coherent interferogram is employed to detect high-speed nano-scale displacement and direction of the external vibration. An innovative real time fringe-locking operation is performed and a new vertical scanning technique is performed accordingly to isolate vertical scanning from environmental disturbances. The feasibility of the anti-vibration VSI system is verified by performing some of industrial in-field examples. Based on the experimental result, the fringe locking technique can improve the measurement result.

vibration resistantnano-scale measurementactive feedback systemreal-time control systemautomatic optical inspection (AOI)

Liang-Chia Chen、Abraham Mario Tapilouw、Sheng-Lih Yeh、Shih-Tsong Lin、Jin-Liang Chen、Huan-Chi Huang

展开 >

Graduate Institute of Automation Technology, National Taipei University of Technology, 1, Sec. 3, Zhongxiao East Rd. Taipei, Taiwan 106

Department of Mechanical Engineering, Lunghwa University of Science and Technology No.300, Sec.1, Wanshou Rd., Guishan, Taoyuan County 33306,Taiwan (R.O.C.)

Graduate Institute of Electro-Optical Engineering, National Taipei University of Technology, 1, Sec. 3, Zhongxiao East Rd. Taipei, Taiwan 106

Industrial Technology Research Institute (ITRI), 321, Sec. 2, Guang Fu Rd. Hsinchu, Taiwan 30031

展开 >

2010

10.4028/www.scientific.net/KEM.437.89

Key engineering materials

Key engineering materials

ISSN：1013-9826
年,卷(期)：2010.437
  • 3
  • 17