首页|Oil-Filled Isolated High Pressure Sensor for High Temperature Application
Oil-Filled Isolated High Pressure Sensor for High Temperature Application
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Trans Tech Publications Ltd
In order to solve pressure measurement problems in the fields of aerospace, petroleum and chemical industry, mobile and military industry, a oil-filled isolated piezoresistive high pressure sensor has been developed with the range of 0～100 MPa, and was able to work reliably under high temperature of above 200 ℃. Based on MEMS (Micro Electro-Mechanical System) and SIMOX (Separation by Implantation of Oxygen) technology, the piezoresistive sensor chip has been developed. By high temperature packaging process, the oil-filled isolated high pressure sensor was fabricated with the sensor chip and corrugated diaphragm. The experimental results showed that the oil-filled isolated high pressure sensor had good performances under high temperature of 200 ℃, such as linearity error of 0.07%FS, repeatability error of 0.04%FS, hysteresis error of 0.03%FS.
Zhuangde Jiang、Libo Zhao、Yulong Zhao、Yuanhao Liu、Philip D. Prewett、Kyle Jiang
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State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University No. 28 Xianning West Road, Xi'an, 710049, P. R. ChinaSchool of Mechanical Engineering, University of Birmingham
State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University No. 28 Xianning West Road, Xi'an, 710049, P. R. China
School of Mechanical Engineering, University of Birmingham
NETL
NSTL
Trans Tech Publications Ltd
