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Application of Diode Lasers in Interferometrical Length Measurements

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The experimental results for the determination of the form of thin cylinders (O ~ 2.5 mm) as well as step heights of gauge blocks (~ 100 μm) and roundness profiles of test samples from metal or glass with different diameters between ~ 2.5 mm and 80 mm using two multi-wavelength diode laser interferometers are presented and discussed.

diode laserinterferometrylength measurementformroundness

Alexander Hoeink、Karl Meiners-Hagen、Otto Jusko、Ahmed Abou-Zeid

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Physikalisch-Technische Bundesanstalt (PTB) Bundesallee 100, 38116 Braunschweig, Germany

2010

Key engineering materials

Key engineering materials

ISSN:1013-9826
年,卷(期):2010.437
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