首页|High Throughput System for Geometry Inspection of Large-Size Distributed Objects
High Throughput System for Geometry Inspection of Large-Size Distributed Objects
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NETL
NSTL
Trans Tech Publications Ltd
The article presents a measurement system designed for "on-line" high throughput simultaneous optical inspection of large set of geometrical parameters (more than 1000 points) defining geometry of some complex surface. The measurement system is based on the distributed network of optical distance sensors. Specialized optical sensor as basic system element was developed for this purpose. Among its features are the following: non-contact measurement, high optical and electromagnetic noise immunity, small footprint, and mass-production oriented. The system allows us to measure up to 1700 linear distance parameters simultaneously in the range of 40mm, with accuracy (3σ) of 0.1 mm and sampling rate of at least 10~3 Hz.
non-contact measurementoptical inspectionin-process and on-line metrology
Sergei N. Makarov、Alexander G. Verkhogliad
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Technological Design Institute of Scientific Instrument Engineering (TDI SIE) Siberian Branch of the Russian Academy of Sciences (SB RAS) 41, Russkaya str., Novosibirsk, 630058, Russia
NETL
NSTL
Trans Tech Publications Ltd
