首页|Micromechanical Optical Scanner for Terahertz Spectrum Diapason

Micromechanical Optical Scanner for Terahertz Spectrum Diapason

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This paper considers the possibility of creation of a micromechanical optical scanner (MOEMS-scanner) for terahertz spectrum diapason of radiation frequencies.

micromechanical optical scannertorsional micromirrorsdiffraction gratingdiffraction order

Vladimir S. Korneyev、Vladimir V. Chesnokov、Dmitriy V. Chesnokov

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Siberian State Geodesic Academy, 10 Plakhotnogo str., Novosibirsk, 630108, Russia

2010

10.4028/www.scientific.net/KEM.437.291

Key engineering materials

Key engineering materials

ISSN：1013-9826
年,卷(期)：2010.437
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