首页|Electrochemical Nanostructuring of Semiconductors by Capillary-Cell Method

Electrochemical Nanostructuring of Semiconductors by Capillary-Cell Method

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  • Trans Tech Publications Ltd
Wafers of silicon and compound semiconductors are nanostructured by using electrochemical or chemical etching (stain etching) in etching cell with electrolyte kept by capillary forces. Atomic force microscopy, infrared spectroscopy and Raman scattering methods reveale nanoporous and nanocrystalline structure of the treated surfaces. The formed porous semiconductors demonstrate efficient photoluminescence, which is controlled by etching parameters, i.e. current density, electrolyte content, etc. These results indicate good prospects of the employed capillary-cell method for preparing nanostructured porous materials with desired structure and optical properties.

nanocrystall ine structureporous semiconductorscapillary-cell methodelectrochemical and chemical etchingphotoluminescence

Y.T. Taurbayev、K.A. Gonchar、A.V. Zoteev、V. Yu. Timoshenko、Z. Zh. Zhanabayev、V.E. Nikulin、T.I. Taurbayev

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Al Farabi Kazakh National University, 96 Tole bi Str., 050000 Almaty, Kazakhstan

Lomonosov Moscow State University, Physics Department, 119991 Moscow, Russia

2010

10.4028/www.scientific.net/KEM.442.1

Key engineering materials

Key engineering materials

ISSN：1013-9826
年,卷(期)：2010.442
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