首页|Erosion Mechanism of Ultrasonic Vibration Abrasive Waterjet in Micro Machining

Erosion Mechanism of Ultrasonic Vibration Abrasive Waterjet in Micro Machining

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  • Trans Tech Publications Ltd
In this paper, a study on erosion mechanism of Ultrasonic Vibration Abrasive Waterjet is presented. Theoretical analysis of the total effective erosion kinetic energy of UVAWJ is performed. By using a UVAWJ machining system with an Ultrasonic Vibration Power Workbench, the comparative experiment is conducted. The erosion surfaces of the single crystal silicon substrate were measured by Optical Profiler and observed with Scanning Electron Microscope. The material removal mechanisms are discussed. It is concluded that the erosion by UVAWJ, with the aid of high-frequency ultrasonic vibration, can obtains a high material removal, less cracks and good finish surface.

abrasive waterjetultrasonic vibrationerosion mechanismmicro machining

Hongtao Zhu、Chuanzhen Huang、Jun Wang、Zengwen Liu、Shuguang Zhang

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Center for Advanced Jet Engineering Technologies (CaJET),Key Laboratory of High Efficiency and Clean Mechanical Manufacture, Ministry of Education,School of Mechanical Engineering, Shandong University, Jinan, China, 250061

School of Mechanical and Manufacturing Engineering,The University of New South Wales, Sydney, Australia, NSW 2052

2010

10.4028/www.scientific.net/KEM.443.675

Key engineering materials

Key engineering materials

ISSN：1013-9826
年,卷(期)：2010.443
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