首页|Relationship between aluminum and lithium and annealing for reducing lithium contamination in aluminum-implanted zinc oxide

Relationship between aluminum and lithium and annealing for reducing lithium contamination in aluminum-implanted zinc oxide

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  • NSTL
  • Trans Tech Publications Ltd
The relationship between Al and Li during diffusion was studied using Al-implanted ZnO. The Al donor in ZnO acts to increase the concentration of Li contamination from the atmosphere during the annealing. It is difficult to decompose the relationship formed by diffusion between Al and Li during high-temperature annealing. The most effective method to decompose the relationship is to anneal the as-implanted ZnO at a pressure of 5×10~(-3) torr. This annealing increases the Al solubility limit because the ZnO surface evaporates.

ion implantationdefectssecondary ion mass spectrometry

Isao Sakaguchi、Kenji Matsumoto、Takeshi Ohgaki、Shunichi Hishita、Yutaka Adachi、Tsubasa Nakagawa、Ken Watanabe、Naoki Ohashi、Hajime Haneda

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Optronic Materials Center, National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki, 305-0044, Japan

Sensor Materials Center, National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki, 305-0044, Japan Kyushu University, 6-1 Kasuga-kouen, Kasuga, Fukuoka, 816-8580, Japan

Sensor Materials Center, National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki, 305-0044, Japan

Optronic Materials Center, National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki, 305-0044, Japan Kyushu University, 6-1 Kasuga-kouen, Kasuga, Fukuoka, 816-8580, Japan

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2010

10.4028/www.scientific.net/KEM.445.205

Key engineering materials

Key engineering materials

ISSN：1013-9826
年,卷(期)：2010.445
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