首页|TUNABLE BARIUM STRONTIUM TITANATE THIN FILMS BY CSD
TUNABLE BARIUM STRONTIUM TITANATE THIN FILMS BY CSD
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Trans Tech Publications Ltd
Ba_xSr_(1-x)TiO_3 (BST) thin films were deposited by modified CSD, in which partially hydrolyzed Ti-alkoxide was reacted with Ba-Sr precursor solution to form highly polymerized BST precursor solutions, leading to the better electrical properties of the resultant thin films. BST precursor solutions of 0.1 M were prepared to deposit BST thin layers of 17nm ～ 20nm for one dip-coating operation with different barium to strontium ratio of Ba/Sr = 90/10, 70/30 and 50/50. Modified CSD-derived BST thin films were deposited on a Si wafer with Pt electrode or CSD-derived LaNiO_3 (LNO) seeding layer with preferred orientation. BST thin films exhibited ferroelectric or paraelectric properties, depending upon the Ba/Sr ratio. Better electrical properties for the BST thin films were observed on a LNO seeding layer. Maximum tunability of our BST film was 41 % at 1MHz.
thin filmsmodified chemical solution depositionbarium strontium titanatetunabilityorientation controlLNO
Dai Iwasaki、Miho Maruyama、Naonori Sakamoto、Desheng Fu、Naoki Wakiya、Hisao Suzuki
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Department of Materials Science and chemical Engineering, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8561, Japan
NETL
NSTL
Trans Tech Publications Ltd
