Sub Micron Poly-Dimethyl Siloxane (PDMS) Replication Using Proton Beam Fabricated Nickel Moulds
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NETL
NSTL
Trans Tech Publications Ltd
We present a process to fabricate Ni moulds on proton beam written (PBW) PMMA structures. These Ni mould are use to replicate PDMS lab on a chip devices featuring 300 nm details of high vertically, smooth sidewalls and high aspect ratios. The lifespan of the Ni mould can be extended and the functionality improved by means of introducing a 5 nm thick Teflon AF release layer. Following this method, PDMS chips have been fabricated for microfiuidic experiments.
proton beam writingni mouldmicrofluidicsPDMS
Shao Peige、Jeroen A van Kan、Frank Watt
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Centre for Ion Beam Applications, Physics department, National University of Singapore
NETL
NSTL
Trans Tech Publications Ltd
