首页|Electrostatic Control and The Need of Feedback Control lonization in Critical Environment of MEMS Manufacturing Process
Electrostatic Control and The Need of Feedback Control lonization in Critical Environment of MEMS Manufacturing Process
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NETL
NSTL
Trans Tech Publications Ltd
This paper describes new electrostatic control countermeasures and solutions for critical electrostatic control environment for MEMS manufacturing processes, especially in MEMS's wafer handling that needs low electrostatic voltage. This includes personnel grounding methodology, ESD event measurement, and low ion imbalance ionization to support current and future needs of the MEMS.
personal groundingelectrostatic dischargeESD EventMEMSHBM
Anusorn Chakkaew、Wisut Titiroongruang
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Electronic Research Center, Faculty of Engineering, King Mongkut's Institute of Technology Ladkrabang, Bangkok, 10520, Thailand Customer Technical Center, 3M Thailand Limited, Bangkok 10520, Thailand
Electronic Research Center, Faculty of Engineering, King Mongkut's Institute of Technology Ladkrabang, Bangkok, 10520, Thailand
NETL
NSTL
Trans Tech Publications Ltd
