首页|Uncertainty Estimation in Intelligent Coordinate and Profile Measurement

Uncertainty Estimation in Intelligent Coordinate and Profile Measurement

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  • NETL
  • NSTL
  • Trans Tech Publications Ltd
The uncertainty estimation of coordinate and profile measurement is essential for accurate measurement and establishment of traceability. We proposed an uncertainty propagation method to estimate the uncertainty of coordinate and profile measurement. In this article, the multi sensor algorithm with uncertainty estimation method is described for the profile measurement. Additionally, two examples of multi sensor method are introduced. According to the simulation results of assessing uncertainty and the experimental results, the validity of the method was confirmed.

uncertainty estimationcoordinate measurementprofile measurementmulti sensor method

Kiyoshi Takamasu、Satoru Takahashi、Xin Chen

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Department of Precision Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyoku, Tokyo, 113-8656 JAPAN

Department of Information Measuring Technology and Instrument, Shanghai Jiao Tong University, 800 Dongchuan Road, Shanghai, 200240, CHINA

2010

10.4028/www.scientific.net/KEM.447-448.564

Key engineering materials

Key engineering materials

ISSN：1013-9826
年,卷(期)：2010.447/448
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