首页|Hot-Embossing of Microstructures on Large Area of Polymers
Hot-Embossing of Microstructures on Large Area of Polymers
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NETL
NSTL
Trans Tech Publications Ltd
This paper addresses the limitations of current hot embossing machines for mass production applications. It describes the features of a hot embossing machine in terms of machine design for handling large surfaces, embossing head for fast and precise temperature control, and the alignment mechanism for controlling the residual uniformity and planar offsets for producing microstructures uniformly on large area by means of step-and-repeat method. The developed machine demonstrated that microstructures of features size of up to 100μm could be replicated in 250s on PMMA sheet with an electroplated nickel stamp. The linear dimensions of the embossed features however were generally smaller than those in the stamp, which highlighted the importance of precision process control.
nanoimprint lithographyhot-embossingstep-and-repeatlarge area substrates
LIN Wei、CHEN Wenjie、KIEW Choon Meng、NG Chuen Leong、LUO Hong、TEO Chek Sing、YANG Guilin
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Singapore Institute of Manufacturing Technology, Singapore
NETL
NSTL
Trans Tech Publications Ltd
