首页|An Optical Fiber Probe for 3-D Micro Metrology

An Optical Fiber Probe for 3-D Micro Metrology

扫码查看
原文链接
  • NETL
  • NSTL
  • Trans Tech Publications Ltd
This paper presents a system of 3-D micro structure measurement that uses an optical fiber probe of 5 urn in diameter. The probe is deflected when it comes into contact with a measured surface, and this deflection is measured optically. In this research, we optimize design parameters of optical system using ray tracing, and a prototype of the measuring system is fabricated on trial to verify the simulation results. Then, its measuring accuracies are examined by using the basic experimental apparatus. As a result, it is clarified that the resolution of the fiber probe is better than 10 nm. Also, the utility of this system is confirmed by measuring the shape of a 600 urn diameter ruby sphere.

coordinate metrologymicro-CMMmeasurementoptical fiber probelaser diodemicro holemicro structure

Hiroshi MURAKAMI、Akio KATSUKI、Hiromichi ONIKURA、Takao SAJIMA、Norio KAWAGOISHI、Eiji KONDO、Tomohiro HONDA

展开 >

Department of Mechanical Engineering, Faculty of Engineering, Kyushu Sangyo University, 3-1 Matsukadai 2-chome, Higashi-ku, Fukuoka, 813-8503, JAPAN

Department of Mechanical Engineering, Faculty of Engineering, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka, JAPAN

Department of Mechanical Engineering, Graduate School of Science and Engineering, Kagoshima University, 1-21-40 Koorimoto, Kagoshima, 890-0065, JAPAN

2010

10.4028/www.scientific.net/KEM.447-448.524

Key engineering materials

Key engineering materials

ISSN：1013-9826
年,卷(期)：2010.447/448
  • 1
  • 8