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Surface micro-structuring using polymer elongation

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High-aspect structures are fabricated by photo-polymer elongation using a template. The template, tungsten wire of sub-mm diameter, makes SU-8 film locally stretched and deformed in long and fine fibrous geometry. The aspect ratio of fabricated structure becomes over 8, while the finest diameter is less than 10μm. Both of surface tension and viscosity of SU-8 film determines the yield of fibrous micro-structure. The wire diameter and drawing distance allow one to obtain desired profile of structure. Fibrous structures can be hexagonally aligned utilizing appropriate template with specific diameter and pitch of wire designed based on an analysis of surface energy.

micro-structurephoto-polymerhigh-aspect structureelongation

Arata Kaneko、Hayato Kobayashi、Nobuyuki Moronuki

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Tokyo Metropolitan University 6-6 Asahigaoka, Hino, Tokyo 191-0065, Japan

2010

Key engineering materials

Key engineering materials

ISSN:1013-9826
年,卷(期):2010.447/448
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