首页|Fabrication of Ultraprecision Millimeter-thick Elliptical Neutron Focusing Mirror Substrate by Local Wet Etching

Fabrication of Ultraprecision Millimeter-thick Elliptical Neutron Focusing Mirror Substrate by Local Wet Etching

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  • NETL
  • NSTL
  • Trans Tech Publications Ltd
Numerically controlled local wet etching (NC-LWE) is a novel technique to fabricate the ultraprecision optical components and/or finishing the functional materials. In this technique, a figuring is performed by controlling the dwelling time of the combination nozzle, which consists of a supply and a suction part of an etchant, on the workpiece. In this paper, we proposed fabrication process of millimeter-thick elliptical neutron focusing mirror substrate by applying NC-LWE figuring involving CeO_2 slurry polishing. We fabricated a millimeter-thick elliptical neutron focusing mirror substrate with a figure error of less than 0.2 μm and obtained a surface roughness of less than 0.15 nm rms.

neutron supermirrorlocal wet etchingion beam sputteringelliptical mirrorfocusing

Fumiya Yamaga、Mikinori Nagano、Nobuyuki Zettsu、Dai Yamazaki、Ryuji Maruyama、Kazuhiko Soyama、Kazuya Yamamura

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Research Center for Ultra-precision Science and Technology, Graduate School of Engineering, Osaka University, Yamadaoka 2-1, Suita, Osaka 565-0871, Japan

J-PARC Center, Japan Atomic Energy Agency, Tokai-mura, Ibaraki, Japan

2010

10.4028/www.scientific.net/KEM.447-448.208

Key engineering materials

Key engineering materials

ISSN：1013-9826
年,卷(期)：2010.447/448
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