Comparison of the bias voltage effect and the force effect during the nanoscale AFM electric lithography on the copper thin film surface

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原文链接

外文关键词：

AFM electric nanolithographytip‐based nanofabricationnanofabrication of the metallic thin filmnanoscale scratchingnanoscale thermal effect

作者：

Yang Ye、Lin Jun

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作者单位：

Shanghai Normal University The College of Information Mechanical and Electrical Engineering Shanghai China

出版年：

2016

DOI：

Scanning: The journal of scanning microscopy

SCI

ISSN：0161-0457

年,卷(期)：2016.38(5)