Abstract
The following quote was obtained by the news editors from the background information supplied bythe inventors: ““Technical Field“The exemplary and non-limiting embodiments relate generally to a system for transporting substratesand, more particularly, to a system for transporting substrates, in vacuum, having a linear configuration.”In addition to the background information obtained for this patent application, NewsRx journalists alsoobtained the inventors’ summary information for this patent application: “In accordance with one aspectof the exemplary embodiment, an apparatus is provided comprising a first device configured to support atleast one substrate thereon; and a first transport having the device connected thereto, where the transportis configured to carry the device, where the transport comprises: a plurality of supports which are movablerelative to one another along a linear path; at least one magnetic bearing which at least partially couplesthe supports to one another, where a first one of the magnetic bearings comprises a first permanent magnetand a second magnet, where the first permanent magnet is connected to a first one of the supports; anda magnetic field adjuster connected to the first support which is configured to move the first permanent magnet and/or vary influence of a magnetic field of the first permanent magnet relative to the secondmagnet.
NETL
NSTL