首页|Patent Issued for Travel robot for moving substrate transfer robot in chamber (USPTO 11850744)
Patent Issued for Travel robot for moving substrate transfer robot in chamber (USPTO 11850744)
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NETL
NSTL
The assignee for this patent, patent number 11850744, is T-Robotics Co. Ltd. (Osan-si, South Korea).Reporters obtained the following quote from the background information supplied by the inventors:“In general, a substrate such as a wafer for a semiconductor device, a glass substrate for a displaydevice, or a glass substrate for a thin film solar cell is manufactured by performing various processes onthe substrate. During these processes, the substrate is loaded and processed in a substrate processingequipment that provides optimal conditions for each of the processes.“Nowadays, in order to improve productivity, a cluster-type substrate processing equipment capable ofcollectively processing the substrate is being developed and used.
NETL
NSTL
