首页|Optical emission spectroscopy of vanadium cathodic arc plasma at different nitrogen pressure
Optical emission spectroscopy of vanadium cathodic arc plasma at different nitrogen pressure
扫码查看
点击上方二维码区域，可以放大扫码查看
原文链接
NETL
NSTL
Optical emission spectroscopy studies of vanadium plasma in a cathodic-arc discharge in a nitrogen atmosphere have been carried out. Spectral lines of neutral atoms and ions of the cathode material V, V~(1+), and V~(2+), and nitrogen N_2 and N_2~+ were observed in the discharge plasma. Analysis and comparison of the intensity of vanadium and nitrogen spectral lines as a function of nitrogen pressure showed that in vacuum excited ions V~(2+) and V~+ are registered, with increasing pressure, the lines V~+*, N_2*, and N_2~+* are observed, and at pressures above 0.5 Pa, the neutral vanadium lines are additionally registered. The electron temperature of T_e decreases from 5.9 to 3-4 eV with increasing pressure. Studies of cross-sectional scanning electron microscopy images of VN coatings deposited at different nitrogen pressures have shown that a dense, homogeneous, fine-grained microstructure is formed in the coating when the number of neutral V in the plasma is low, while in the presence of a large number of neutrals, the coating structure changes to a dense structure with columnar growth.
Yu. V. Kovtun、A. S. Kuprin、A. N. Shapoval、S. A. Leonov、R. L. Vasilenko、Yu. A. Besedina
展开 >
National Science Center Kharkiv Institute of Physics and Technology, Kharkiv, Ukraine
NETL
NSTL
