首页|Patent Issued for Vertical batch furnace assembly (USPTO 11876008)
Patent Issued for Vertical batch furnace assembly (USPTO 11876008)
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From Alexandria, Virginia, NewsRx journalists report that a patent by the inventor de Ridder, Chris G. M. (Hoogland, NL), filed on December 14, 2021, was published online on January 16, 2024. The patent’s assignee for patent number 11876008 is ASM IP Holding B.V. (Almere, Netherlands). News editors obtained the following quote from the background information supplied by the inventors: “Most vertical batch furnace assemblies are provided with a cassette handling space for receiving and storing wafer cassettes therein. Such a cassette handling space is typically provided with a cassette handling mechanism for transferring wafer cassettes between a cassette in-out port, a cassette storage and a wafer transfer position. At the cassette in-out port wafer cassettes may be exchanged between the vertical batch furnace assembly and the cleanroom-environment in which the vertical batch furnace assembly is accommodated. The received wafer cassettes may be placed in the wafer transfer position from which position wafers may be unloaded from the wafer cassette and loaded to a wafer boat for processing of said wafers.
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