首页|'Substrate Transport Apparatus With Multiple Movable Arms Utilizing A Mechanical Switch Mechanism' in Patent Application Approval Process (USPTO 20240066685)
'Substrate Transport Apparatus With Multiple Movable Arms Utilizing A Mechanical Switch Mechanism' in Patent Application Approval Process (USPTO 20240066685)
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NSTL
The following quote was obtained by the news editors from the background informa tion supplied by the inventors: “ “The disclosed embodiments relate to a substrate transport apparatus and, more p articularly, to substrate transport apparatus with multiple movable arms utilizi ng a mechanical switch mechanism. “In conventional multiple arm substrate transport apparatus, the arms or linkage s of the transports are actuated by a complex arrangement of three or more motor s, which for example may be configured in a coaxial manner and coupled to the li nkages through concentrically arranged hollow shafts for providing the transport with movement having three degrees of freedom. Typically the outermost shaft ma y be coupled to a hub for rotating the multiple arms about, for example, a centr al axis of rotation. Two inner shafts, for example, may be connected to a respec tive one of the multiple arms through independent belt and pulley arrangements. As may be realized, the larger the number of motors employed for effecting movem ent of the transport, the greater the burden on the control system controlling t he motion of the transport. Also, the larger number of motors employed increases the potential for motor failure as well as the cost of the transport.
NETL
NSTL
