Abstract
News editors obtained the following quote from the background information suppli ed by the inventors: 'Electronic device manufacturing systems typically include process tools having multiple process chambers and one or more load-lock chamber s, which may be connected to a transfer chamber. Such process chambers may be us ed to carry out any number of processes on substrates (e.g., silicon-containing wafers, both patterned and unpatterned, masked wafers, glass plates, silica-cont aining articles, and so forth) such as deposition, oxidation, nitration, etching, polishing, cleaning, lithography, metrology, and so forth.
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