首页|Researchers Submit Patent Application, 'Multi-Turn Drive Assembly And Systems And Methods Of Use Thereof', for Approval (USPTO 20240075613)
Researchers Submit Patent Application, 'Multi-Turn Drive Assembly And Systems And Methods Of Use Thereof', for Approval (USPTO 20240075613)
扫码查看
点击上方二维码区域，可以放大扫码查看
原文链接
NETL
NSTL
News editors obtained the following quote from the background information suppli ed by the inventors: 'Electronic device manufacturing systems typically include process tools having multiple process chambers and one or more load-lock chamber s, which may be connected to a transfer chamber. Such process chambers may be us ed to carry out any number of processes on substrates (e.g., silicon-containing wafers, both patterned and unpatterned, masked wafers, glass plates, silica-cont aining articles, and so forth) such as deposition, oxidation, nitration, etching, polishing, cleaning, lithography, metrology, and so forth.
NETL
NSTL
