Abstract
The following quote was obtained by the news editors from the background informa tion supplied bythe inventors: ““Field of the Invention“The present invention relates to a technology for detecting an alignment mark f rom an object.“Description of the Background Art““Background Art“Conventionally, in an apparatus that performs fine processing on an object, suc h as a semiconductormanufacturing apparatus, the object is aligned on the basis of an alignment mark placed on the object.The conventional technology for alig ning an object using an alignment mark is described in JapanesePatent Applicati on Laid-Open No. 2022-068832, for example.
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