首页|Patent Application Titled 'Transfer System And Transfer Method' Published Online (USPTO 20240109200)
Patent Application Titled 'Transfer System And Transfer Method' Published Online (USPTO 20240109200)
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No assignee for this patent application has been made.Reporters obtained the following quote from the background information supplied by the inventors: “Inthe related art, a transfer system has been known, which u ses a robot with a hand to transfer substratessuch as wafers and panels to and from a cassette that holds the substrates.“For example, a technique has been proposed, which detects the possibility of co ntact between a robotand a wafer accommodated in a cassette by a wafer transfer arm or a cassette sensor (see, e.g., JapanesePatent Laid-Open Publication No. 2007-234936).”
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