首页|Patent Application Titled 'Composite Data For Device Metrology' Published Online (USPTO 20240111256)
Patent Application Titled 'Composite Data For Device Metrology' Published Online (USPTO 20240111256)
扫码查看
点击上方二维码区域，可以放大扫码查看
原文链接
NETL
NSTL
The assignee for this patent application is Onto Innovation Inc. (Wilmington, Ma ssachusetts, UnitedStates).Reporters obtained the following quote from the background information supplied by the inventors:“Semiconductor and other similar industries often use optical metrology, such as optical metrology or Xraymetrology, to provide non-contact evaluation of samples during processing. With optical metrology, forexample, a sample under test is illuminated with light, e.g., at a single wavelength or mul tiple wavelengths.After the light interacts with the sample, the resulting ligh t is detected and analyzed to determine at leastone characteristic of the sample.
NETL
NSTL
