Abstract
The assignee for this patent application is Onto Innovation Inc. (Wilmington, Ma ssachusetts, UnitedStates).Reporters obtained the following quote from the background information supplied by the inventors:“Semiconductor and other similar industries often use optical metrology, such as optical metrology or Xraymetrology, to provide non-contact evaluation of samples during processing. With optical metrology, forexample, a sample under test is illuminated with light, e.g., at a single wavelength or mul tiple wavelengths.After the light interacts with the sample, the resulting ligh t is detected and analyzed to determine at leastone characteristic of the sample.
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