Abstract
News editors obtained the following quote from the background information suppli ed by the inventors:“In the related art, a transfer system has been known, whic h uses a robot with a hand to transfer substratessuch as wafers and panels to a nd from a cassette that holds the substrates. “For example, a technique has been proposed, which detects the possibility of co ntact between a robotand a wafer accommodated in a cassette by a wafer transfer arm or a cassette sensor (see, e.g., JapanesePatent Laid-Open Publication No. 2007-234936).”
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