Abstract
From the background information supplied by the inventors, news correspondents o btained the following quote: “BACKGROUND ART “Conventionally, a robot hand which grips a substrate is known. Patent Document 1 discloses a wafer transferring robot as one example of such a robot hand. “Patent Document 1 discloses to advance a mover of an ultrasonic motor toward a tip end of a hand, and push a wafer by a mobile claw toward a fixed claw which i s fixed to the robot hand on its tip-end side, so as to grip an edge part of the wafer by the mobile claw and the fixed claw.”
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