首页|'Substrate Transport Robot And Substrate Processing System Including The Same' in Patent Application Approval Process (USPTO 20240139967)
'Substrate Transport Robot And Substrate Processing System Including The Same' in Patent Application Approval Process (USPTO 20240139967)
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The following quote was obtained by the news editors from the background informa tion supplied by the inventors: “ “The present disclosure relates to a substrate transport robot and a substrate p rocessing system including the same, and more particularly, a substrate transpor t robot, which is used in semiconductor manufacturing processes, and a substrate processing system including the substrate transport robot. “Semiconductor manufacturing processes may be performed continuously within semi conductor manufacturing equipment and may be divided into front-end and back-end processes. The front-end process refers to the process of forming circuit patte rns on a wafer to complete semiconductor chips, while the back-end process refer s to the process of evaluating the performance of the finished products from the front-end process.
NETL
NSTL
