Abstract
The following quote was obtained by the news editors from the background informa tion supplied by the inventors: “ “The present disclosure relates to a substrate transport robot and a substrate p rocessing system including the same, and more particularly, a substrate transpor t robot, which is used in semiconductor manufacturing processes, and a substrate processing system including the substrate transport robot. “Semiconductor manufacturing processes may be performed continuously within semi conductor manufacturing equipment and may be divided into front-end and back-end processes. The front-end process refers to the process of forming circuit patte rns on a wafer to complete semiconductor chips, while the back-end process refer s to the process of evaluating the performance of the finished products from the front-end process.
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