Abstract
By a News Reporter-Staff News Editor at Robotics & Machine Learning Daily News Daily News – From Washington, D.C., NewsRx journali sts report that a patent application by the inventors AN, Byungin (Cheonan-si, K R); KIM, Tae Yong (Gunpo-si, KR), filed on September 29, 2023, was made availabl e online on April 18, 2024. No assignee for this patent application has been made. News editors obtained the following quote from the background information suppli ed by the inventors: “ “The present invention relates to a substrate processing apparatus and substrate processing method and, more particularly, to a substrate processing apparatus a nd substrate processing method capable of increasing utilization of equipment an d minimizing a footprint of the equipment because the function of a dual loader is performed with one load port module by using an embedded dual adaptor.
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