首页|Patent Issued for Vertical batch furnace assembly with detector to detect casset te (USPTO 12009241)
Patent Issued for Vertical batch furnace assembly with detector to detect casset te (USPTO 12009241)
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The following quote was obtained by the news editors from the background informa tion supplied by the inventors: “Most vertical batch furnace assemblies are prov ided with a cassette handling space for receiving and storing wafer cassettes th erein. Such a cassette handling space is typically provided with a cassette hand ling mechanism for transferring wafer cassettes between a cassette in-out port, a cassette storage and a wafer transfer position. At the cassette in-out port, w afer cassettes may be exchanged between the vertical batch furnace assembly and the cleanroom-environment, in which the vertical batch furnace assembly is accom modated. The received wafer cassettes may be placed in the wafer transfer positi on from which position wafers may be unloaded from the wafer cassette and loaded to a wafer boat for processing of said wafers.
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