首页|Researchers Submit Patent Application, 'Substrate Transfer Robot System And Teac hing Method For Substrate Transfer Robot', for Approval (USPTO 20240178043)
Researchers Submit Patent Application, 'Substrate Transfer Robot System And Teac hing Method For Substrate Transfer Robot', for Approval (USPTO 20240178043)
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News editors obtained the following quote from the background information suppli ed by the inventors: “In the related art, a transfer system has been known, whic h uses a robot with a hand to transfer substrates such as wafers and panels to a nd from a cassette that holds the substrates. “In such a transfer system, it is necessary to perform a teaching work in advanc e to teach the robot the position of entry of the hand into the cassette. Regard ing the teaching work, for example, a technique has been proposed in which the t eaching work is performed using a dummy cassette formed in the same shape as the cassette used in actual operation (see, e.g., Japanese Patent Laid-Open Publica tion No. 2019-214107).”
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