摘要
根据NewsRx记者来自华盛顿特区的新闻报道，由一名新闻记者兼机器人与机器学习每日新闻的工作人员新闻编辑发明者Mori Takayuki（东京，JP）于2023年11月9日提交的专利申请于2024年5月30日在网上公布。本专利申请未转让给公司或机构。新闻编辑从本发明人提供的背景信息中获得以下引文：“本公开涉及基板附着/分离机器人、基板附着/分离方法和薄膜形成装置。”迄今为止，构造成附着或分离基板的基板附着/分离机器人是已知的，用于附着或分离基板的基板附着/分离方法，并且，也已知构造成在基板上进行成膜处理的成膜装置(例如，参见日本特开2010-222700号公报)。
Abstract
By a News Reporter-Staff News Editor at Robotics & Machine Learning Daily News Daily News-A patent application by the inventor M ORI, Takayuki (Tokyo, JP), filed on November 9, 2023, was made available online on May 30, 2024, according to news reporting originating from Washington, D.C., by NewsRx correspondents. This patent application has not been assigned to a company or institution. The following quote was obtained by the news editors from the background informa tion supplied by the inventors: " "The present disclosure relates to a substrate attaching/detaching robot, a subs trate attaching/ detaching method, and a film formation apparatus. "Hitherto, a substrate attaching/detaching robot configured to attach or detach a substrate has been known. A substrate attaching/detaching method for attaching or detaching a substrate, and a film formation apparatus configured to perform film formation processes on a substrate have also been known (for example, see J apanese Laid-Open Patent Application Publication No. 2010-222700)."
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