首页|Researcher from Macau University of Science and Technology Reports Details of Ne w Studies and Findings in the Area of Robotics (Wafer Delay Minimization in Sche duling Single-Arm Cluster Tools with Two-Space Process Modules)
Researcher from Macau University of Science and Technology Reports Details of Ne w Studies and Findings in the Area of Robotics (Wafer Delay Minimization in Sche duling Single-Arm Cluster Tools with Two-Space Process Modules)
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By a News Reporter-Staff News Editor at Robotics & Machine Learning Daily News Daily News-Data detailed on robotics have been pr esented. According to news reporting from Macao, People's Republic of China, by NewsRx journalists, research stated, "In semiconductor manufacturing, multi-spac e process modules (PMs) are adopted in some cluster tools for wafer processing. With multi-space PMs, a PM can have multiple wafers concurrently." Financial supporters for this research include Science And Technology Developmen t Fund (Fdct), Macau Sar. The news editors obtained a quote from the research from Macau University of Sci ence and Technology: "Also, the internal chamber in a PM should rotate to make t he robot able to load/unload a wafer into/from a space in the PM. This means tha t the wafer staying time in PMs is affected by both the rotation operations of t he internal chambers of PMs and the robot tasks. Thus, minimizing the wafer dela y time is quite challenging. In this work, for cluster tools with single-arm rob ots and two-space PMs, efforts are made for wafer delay minimization in scheduli ng the tools. Specifically, a two-wafer backward strategy is presented to operat e the tools in a steady state. Then, the workloads of each processing step and t he robot are analyzed."
Macau University of Science and Technolo gyMacaoPeople's Republic of ChinaAsiaEmerging TechnologiesMachine Lear ningRobotRobotics
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