摘要
由一名新闻记者-机器人与机器学习的工作人员新闻编辑每日新闻-关于机器人的详细数据已经公布。据新华社澳门新闻报道，研究称，“在半导体制造中，一些晶圆加工集群工具采用了多SPAC E工艺模块(PMs)。通过多空间PMs，一个PM可以同时拥有多个晶圆。”这项研究的资助机构包括澳门特区科技发展基金（Fdct）。新闻编辑们从澳门科技大学的研究中得到一句话：PM的内腔应旋转，以使机器人能够将晶圆装载/卸载到PM的空间中。这意味着PM的内腔的旋转操作和机器人任务都会影响晶圆在PM中的停留时间。因此，最小化晶圆延迟时间是相当具有挑战性的。针对具有单臂ROB OTS和双空间PMs的集群工具,研究了在调度工具时尽量减少晶圆延迟的问题,提出了一种双晶圆逆向策略,使工具在稳定状态下运行,并分析了每个加工步骤和机器人的工作量.
Abstract
By a News Reporter-Staff News Editor at Robotics & Machine Learning Daily News Daily News-Data detailed on robotics have been pr esented. According to news reporting from Macao, People's Republic of China, by NewsRx journalists, research stated, "In semiconductor manufacturing, multi-spac e process modules (PMs) are adopted in some cluster tools for wafer processing. With multi-space PMs, a PM can have multiple wafers concurrently." Financial supporters for this research include Science And Technology Developmen t Fund (Fdct), Macau Sar. The news editors obtained a quote from the research from Macau University of Sci ence and Technology: "Also, the internal chamber in a PM should rotate to make t he robot able to load/unload a wafer into/from a space in the PM. This means tha t the wafer staying time in PMs is affected by both the rotation operations of t he internal chambers of PMs and the robot tasks. Thus, minimizing the wafer dela y time is quite challenging. In this work, for cluster tools with single-arm rob ots and two-space PMs, efforts are made for wafer delay minimization in scheduli ng the tools. Specifically, a two-wafer backward strategy is presented to operat e the tools in a steady state. Then, the workloads of each processing step and t he robot are analyzed."
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