摘要
根据NewsR X记者来自弗吉尼亚州亚历山大市的新闻报道，Robotics&Machine Learning Daily News的新闻记者兼工作人员新闻编辑-发明者Choi,Youngj In(加利福尼亚州圣何塞)于2021年6月11日提交的专利于2024年5月21日在网上发表。专利号11987884转让给Jnk Tech(San Jose,California,United Sta TES)。新闻编辑从发明人提供的背景信息中获得了以下引文：“玻璃和晶片用各种涂层涂覆，以增强它们的机械、化学、光学、电、磁或其它性能。通常，通过几种已知工艺之一在衬底上沉积一个或多个薄膜，化学气相沉积(CVD)是一种在基片上沉积薄膜的常用工艺。该工艺在特殊的室中进行,例如PECVD室或PVD室。机器人在没有任何人干预的情况下处理玻璃进出室。该沉积过程通常被监测是否有任何缺陷,如剥落、破裂、破裂、用已知的视觉系统可以检测斑点/污渍等，但是，已知的检测方法有几个局限性，沉积过程容易出现几种已知的检测系统无法检测到的缺陷，并且已知的检测系统不能识别工艺腔中的衬底位置和许多其他工艺参数。
Abstract
By a News Reporter-Staff News Editor at Robotics & Machine Learning Daily News Daily News – A patent by the inventors Choi, Youngj in (San Jose, CA, US), filed on June 11, 2021, was published online on May 21, 2 024, according to news reporting originating from Alexandria, Virginia, by NewsR x correspondents. Patent number 11987884 is assigned to Jnk Tech (San Jose, California, United Sta tes). The following quote was obtained by the news editors from the background informa tion supplied by the inventors: “Glasses and wafers referred to hereinafter as a substrate, are coated with a variety of coatings to enhance their mechanical, c hemical, optical, electric, magnetic, or other properties. Typically, one or mor e thin films are deposited on the substrate by one of several known processes, s uch as chemical vapor deposition (CVD) is a common process for depositing thin f ilms on substrates. The deposition process is conducted in special chambers, suc h as PECVD or PVD chambers. Robots are used to handle the glass in and out of th e chambers without any human intervention. The deposition process is generally m onitored for any defects, such as chipping, break, spot/stain etc. can be detect ed with known vision systems. However, the known inspection methods have several limitations. The deposition process is prone to several kinds of defects which cannot be detected by known inspection systems. Moreover, the known inspection s ystems cannot recognize the substrate location in the process chamber and a lot of other process parameters.
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