首页|Patent Issued for Substrate processing apparatus for processing substrates (USPT O 12040199)
Patent Issued for Substrate processing apparatus for processing substrates (USPT O 12040199)
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This patent was filed on November 28, 2018 and was published online on July 16, 2024.From the background information supplied by the inventors, news correspondents o btained the followingquote: “Cassettes which accommodate a plurality of substra tes may be transferred in a substrate processingapparatus by a cassette handler which may transfer cassettes between a cassette in-out port, a cassettestation and/or a storage device. The storage device may comprise a cassette storage car ousel for storing aplurality of cassettes. A substrate handling robot may be co nstructed and arranged to transfer substratesfrom a cassette at the cassette st ation to a substrate boat to fill the boat with multiple substrates.
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