Abstract
News editors obtained the following quote from the background information suppli ed by the inventors:“Conventional electronic device manufacturing systems (also referred to as device fabrication systems)may include a mainframe around which multiple process chambers and load lock chambers are arranged.The mainframe ma y have a number of side walls (commonly referred to as “facets”) to which proces schambers and/or load lock chambers are coupled. The facets of conventional mai nframes are machinedto have a pre-arranged configuration with chamber ports tha t have predetermined sizes, positions, etc.Once a conventional mainframe is man ufactured, the type, size, arrangement and location of chamberports are fixed f or that mainframe. If an owner of the mainframe wants a new configuration, then a newmainframe having the new configuration is then purchased.”
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