Abstract
Reporters obtained the following quote from the background information supplied by the inventors: ““Field“Embodiments of the present disclosure generally relate to an apparatus and a me thod and, morespecifically, to a substrate processing module and a method of mo ving a workpiece.“Description of the Related Art“Conventional cluster tools are configured to perform one or more processes duri ng substrate processing.For example, a cluster tool can include a physical vapo r deposition (PVD) chamber to perform a PVDprocess on a substrate, an atomic la yer deposition (ALD) chamber for performing an ALD process on a substrate, a che mical vapor deposition (CVD) chamber for performing a CVD process on a substrate ,and/or one or more other processing chambers.
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