首页|Patent Issued for Infinite rotation of vacuum robot linkage through timing belt with isolated environment (USPTO 12076859)
Patent Issued for Infinite rotation of vacuum robot linkage through timing belt with isolated environment (USPTO 12076859)
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From the background information supplied by the inventors, news correspondents o btained the following quote: “Electronic device manufacturing systems typically include process tools having multiple process chambers and one or more load-lock chambers, which may be connected to a transfer chamber. Such process chambers m ay be used to carry out any number of processes on substrates (e.g., silicon-con taining wafers, both patterned and unpatterned, masked wafers, glass plates, sil ica-containing articles, and so forth) such as deposition, oxidation, nitration, etching, polishing, cleaning, lithography, metrology, and so forth.
Applied Materials IncBusinessEmergi ng TechnologiesMachine LearningNano-robotRobotRoboticsTechnology Compa nies
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