Abstract
The assignee for this patent, patent number 12080571, is Applied Materials Inc. (Santa Clara, California, United States). Reporters obtained the following quote from the background information supplied by the inventors: “Field “Embodiments of the present disclosure generally relate to an apparatus and a me thod and, more specifically, to a t substrate processing module and a method of moving a workpiece. “Description of the Related Art “Conventional cluster tools are configured to perform one or more processes duri ng substrate processing. For example, a cluster tool can include a physical vapo r deposition (PVD) chamber to perform a PVD process on a substrate, an atomic la yer deposition (ALD) chamber for performing an ALD process on a substrate, a che mical vapor deposition (CVD) chamber for performing a CVD process on a substrate , and/or one or more other processing chambers.
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