首页|Patent Issued for Substrate processing module and method of moving a workpiece ( USPTO 12080571)
Patent Issued for Substrate processing module and method of moving a workpiece ( USPTO 12080571)
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The assignee for this patent, patent number 12080571, is Applied Materials Inc. (Santa Clara, California, United States). Reporters obtained the following quote from the background information supplied by the inventors: “Field “Embodiments of the present disclosure generally relate to an apparatus and a me thod and, more specifically, to a t substrate processing module and a method of moving a workpiece. “Description of the Related Art “Conventional cluster tools are configured to perform one or more processes duri ng substrate processing. For example, a cluster tool can include a physical vapo r deposition (PVD) chamber to perform a PVD process on a substrate, an atomic la yer deposition (ALD) chamber for performing an ALD process on a substrate, a che mical vapor deposition (CVD) chamber for performing a CVD process on a substrate , and/or one or more other processing chambers.
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